A MEMS pressure sensor using electrostatic levitation
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Sensors Journal
سال: 2021
ISSN: 1530-437X,1558-1748,2379-9153
DOI: 10.1109/jsen.2021.3091665